Dicing saw SATURN

Dicing saw SATURN

 

Wide range of processing materials
 

Saturn dicing saw is designed for high precision dicing and scribing of a wide range of materials:

 

  • Ceramic substrates
  • Quartz
  • Silicon wafers
  • GaAs
  • Ferrites
  • Lithium Niobate
  • MEMS
  • LED
  • Glass and many more.

     

High quality dicing is provided by a rigid frame structure, precisely balanced air bearing spindle shaft and smooth feeding of workpiece. 

Highlights 

·           High precision air bearing spindle for good cut quality and minimal chipping
·           Off-chuck optical blade measuring sensor
·           Best suited for small lot production, Universities an R&D
·           Simple user interface enables fast program entry
·           Air bearing X axis ensures smooth feeding of workpiece

 

 

Closed loop control for high accuracy positioning

Closed loop control is used for positioning along the Y, Z and Theta axes, which allows achieving cutting accuracy up to 3 microns.
 
Constant depth of cut

Saturn dicing saw have an off-chuck optical sensor for dicing blade OD measuring. Together with blade wear forecast algorithm it compensates blade wear during dicing and ensures constant depth of cut. 

 

 Dicing saw SATURN - front view
 Dicing unit
 Optical blade measuring sensor
 Control panel

Specifications: 
 
Workpiece size
mm
up to 150x150
Axis X
Linear guides
-
Air bearing
Cut speed
mm/s
0.1 - 200
Axis Y
Drive
-
Ball screw with stepper motor
Position control
-
Linear encoder
Resolution
mm
0.001
Accuracy
mm
0.003
Axis Z
Drive
-
Ball screw with stepper motor
Position control
-
Linear encoder
Resolution
mm
0.001
Accuracy
mm
0.003
Axis U
Stroke
deg.
360
Position control
-
Rotary encoder
Accuracy

arc.sec

5
Spindle
Power
kW
1.2 (2.2 optional)
Speed

rpm

5 000 - 60 000
 
Supply voltage
-
 230 VAC, 50/60Hz, single phase
Air
l/min
 270 @ 5 bar
Cutting water
l/min
up to 2
Dimensions (WxDxH)
mm
750x1150x1650
Weight
kg
410